Abstract: TiN films were deposited on stainless steel using magnetron sputtering. The effects of nitrogen flow on morphology, composition, structure, microhardness, surface roughness, wear resistance of TiN films were investigated by SEM, microhardness instrument, CSPM5500 scanning probe microscope, XRD, reciprocating friction and wear tester. The results show that with the increasing of the nitrogen flow, the micro-hardness and thickness of the films tend to decrease while bonding strength in an increasing trend. The maximum adhesion substrate is 67.2 N when the value of nitrogen flux is 16 mL/min. Surface roughness and average friction coefficient are the lowest at 8 sccm. With the increasing of nitrogen flow rate, the main growth orientation of the film is transformed from (200) to (111). The color of films become deeper with the increase of the nitrogen flow and the color is golden at 8 mL/min and 12 mL/min, 4 mL/min and 16 mL/min is bad.