Abstract: The uniform CNTs film was prepared on dry and clean quartz substrate with spray and spin coating technology. The morphology of multiwall CNTs was observed by High Resolution Transmission Electron Microscopy (HRTEM). The transmittance and resistance of films were tested with UV-Vis Spectrophotometer (UV-2550) and Four Probe Resistance Tester respectively. We then study the effects of preparation method, heating temperature, concentration of CNTs and film thickness on the transmittance and resistance of films. Results show that transparent and conductive CNTs films can be prepared by choosing optimum parameters with good optical and electronic properties; the light transmittance and resistance can reach 83 % and 800 Ω respectively.